CLEANROOM ROBOTS
Alpha Robotics cleanroom robots
Cleanroom robots built to keep particle generation to a minimum. Suitable for semiconductor, display and other clean processes.
OVERVIEW
Precise motion for cleanroom processes
Fine particles from moving parts can cause product defects, so cleanroom processes need dedicated robots. Besides motion performance, the cleanliness class, materials, special lubrication, cable routing and operating conditions all need to be reviewed.
Cleanliness class differs by series. The ACR series uses a non-contact magnetic levitation structure and suits Class 10 or cleaner environments. The ACM and CMR series support Class 100. The ACR and ACM series have suction ports, and the ACR series offers a maximum speed of 2 m/s and standard strokes up to 2,000 mm. Detailed specifications depend on the model and process environment, so please confirm them before ordering.
APPLICATIONS
Typical applications
Semiconductor Equipment
Transfers wafers, trays and parts inside equipment where particles must be controlled.
Displays
Transfers parts and materials on LCD and other panel production lines.
IT components
Used in production equipment for smartphone, laptop and other IT components.
Inspection & Metrology
Aligns products precisely in front of vision cameras, sensors and measuring equipment.
SELECTION
Checklist before selecting a model
Cleanliness Class
Applicable standard, robot installation area and allowable particle levels on site
Payload & stroke
Total moving load including workpiece and tooling, and the required work area
Repeatability
Positional tolerance required for each assembly, inspection or transfer process
Materials & lubrication
Grease type, surface treatment, exhaust method and restricted materials
Cabling & accessories
Moving cables, air lines, sensors and end effector (gripper) layout
Specification check
Compare the official technical documents for each model with the plant's cleanroom standards before ordering
FAQ
Common questions before you enquire
How do cleanroom robots differ from standard robots?
They use a dust-proof structure and suction ports to reduce particle generation and escape. The structure and cleanliness class of each model are given in the official technical documents.
Are all models rated Class 10?
No. The ACR series, with non-contact magnetic levitation drive, meets Class 10 or cleaner. The ACM and CMR series support Class 100. Tell us the cleanliness your site requires and the equipment environment, and we will recommend a suitable series.
Can I get cleanroom robot consultation in Vietnam?
Yes. Send the required cleanliness class, payload, stroke, repeatability, process specifications and installation location, and Rotomtech will connect you with a local dealer in Vietnam.
VIETNAM PRODUCT ENQUIRIES
Send your process requirements and we will suggest a suitable configuration.
Send the payload, stroke, speed, repeatability, operating environment and installation location. Rotomtech will connect you with a dealer in Vietnam who can advise on the right model and quote.